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Analysis of data from various indentation techniques for thin films intrinsic hardness modelling

type de publication      article in an international journal with refereeing comitee
date de publication 2008
auteur(s) Chicot Didier; Bemporad Edoardo; Galtieri G.; Roudet Francine; Alvisi M.; Lesage Jacky
journal (abréviation) Thin Solid Films (Thin Solid Films)
volume (numéro) 516 (8)
pages 1964 – 1971
résumé Due to the influence of the substrate, direct measurement of the hardness of thin films by standard micro-indentation tests is not always possible. In such situation, determination of the intrinsic film hardness requires the analysis of a set of experimental apparent hardness values obtained for different indentation loads. A number of mathematical equations based on various assumptions were proposed in literature for that purpose. Most of the models were established on the basis of standard Vickers indentation. Using these models to process the data obtained by Knoop indentation does not provide the same intrinsic hardness value, even after Knoop/Vickers standard conversion, than the one obtained from Vickers indentation. The same problem arises when processing the data coming from depth-sensing indentation. A method to obtain comparable hardness values is proposed in the present work by considering an “equivalent” Vickers hardness in the case of Knoop indentations and the corresponding Martens hardness for depth-sensing indentation. This method has been used to determine the intrinsic hardness of titanium nitride film.
mots clés Vickers; Knoop; Depth-sensing indentation; Film hardness modelling; Titanium nitride
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